Patent Assignment
Reel/Frame 015300/0590
Assignment of Assignor's Interest
Recorded: 2004-05-07
Pages: 4
Assignors
TSAI, MING HUAN
Executed: 2004-01-19
CHIANG, RU CHIAN
Executed: 2004-01-19
TAO, HUN JAN
Executed: 2004-01-19
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method for Forming Novel Barc Open for Precision Critical Dimension Control