Patent Assignment
Reel/Frame 015316/0407
Assignment of Assignor's Interest
Recorded: 2004-05-07
Pages: 2
Assignor
KAWANO, BAIEI
Executed: 2004-05-07
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA TAMA-SHI, TOKYO 206-0025, JAPAN
Covered Property
(1)
Thin-Film Deposition Apparatus