Patent Assignment
Reel/Frame 015322/0549
Assignment of Assignor's Interest
Recorded: 2004-05-11
Pages: 3
Assignors
TEN BERGE, PETER
Executed: 2004-05-10
KEIJSERS, GERARDUS JOHANNES JOSEPH
Executed: 2004-04-21
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501,, NL-5504 DR VELDHOVEN,, NETHERLANDS
Covered Property
(1)
Substrate, Method of Preparing a Substrate, Method of Measurement, Lithographic Apparatus, Device Manufacturing Method and Device Manufactured Thereby, and Machine-Readable Storage Medium