Patent Assignment
Reel/Frame 015331/0396
Assignment of Assignor's Interest
Recorded: 2004-05-13
Pages: 2
Assignor
TAKAHASHI, MASAHIRO
Executed: 2004-04-19
Assignee
OKI ELECTRIC INDUSTRY CO., LTD.
7-12, TORANOMON 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method of Dry Etching Semiconductor Substrate to Reduce Crystal Defects in a Trench
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.