Patent Assignment
Reel/Frame 015331/0958
Assignment of Assignor's Interest
Recorded: 2004-05-12
Pages: 2
Assignors
MASUICHI, MIKIO
Executed: 2004-03-02
TAKAMURA, YUKIHIRO
Executed: 2004-03-02
MORIWAKI, SANZO
Executed: 2004-03-09
ADACHI, HIDEKI
Executed: 2004-03-03
Assignee
DAINIPPON SCREEN MFG. CO. LTD.
TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI,KAMIGYO-KU,KYOTO 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Thermal Type Flowmeter Suitable to the Same
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.