Patent Assignment
Reel/Frame 015342/0703
Assignment of Assignor's Interest
Recorded: 2004-05-17
Pages: 2
Assignor
SCHELLHORN, UWE
Executed: 2004-02-06
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Phase Shifting Wavefront Interference Method
Patent:
7,119,910 →
Application:
10/697,239 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.