Patent Assignment
Reel/Frame 015352/0768
Assignment of Assignor's Interest
Recorded: 2004-11-08
Pages: 2
Assignors
CHANG, JEREMY
Executed: 2004-09-03
FISCHER, ANDREAS
Executed: 2004-10-05
LOEWENHARDT, PETER
Executed: 2004-09-03
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Wafer Bevel Polymer Removal