Patent Assignment
Reel/Frame 015381/0392
Assignment of Assignor's Interest
Recorded: 2004-05-24
Pages: 3
Assignors
WALTHER, STEVEN R.
Executed: 2004-05-13
FANG, ZIWEI
Executed: 2004-05-13
TOCCO, JUSTIN
Executed: 2004-05-13
ELLIS, CARLETON F., III
Executed: 2004-05-13
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Methods for Stable and Repeatable Ion Implantation