Patent Assignment
Reel/Frame 015382/0265
Assignment of Assignor's Interest
Recorded: 2004-05-24
Pages: 3
Assignors
LOKE, CHOU SAN NELSON
Executed: 2004-05-24
YOSHIOKA, KANAKO
Executed: 2004-05-24
SATOH, KIYOSHI
Executed: 2004-05-24
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO 206-0025, JAPAN
Covered Property
(1)
Low-Carbon-Doped Silicon Oxide Film and Damascene Structure Using Same