Patent Assignment
Reel/Frame 015398/0088
Assignment of Assignor's Interest
Recorded: 2004-11-22
Pages: 5
Assignors
WEDOWSKI, MARCO
Executed: 2004-08-31
STIETZ, FRANK
Executed: 2004-10-15
MERTENS, BAS
Executed: 2004-09-08
KLEIN, ROMAN
Executed: 2004-09-17
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22 73447, OBERKOCHEN, GERMANY
Covered Property
(1)
Device, Euv-Lithographic Device and Method for Preventing and Cleaning Contamination on Optical Elements
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.