Patent Assignment
Reel/Frame 015410/0672
Assignment of Assignor's Interest
Recorded: 2004-06-01
Pages: 3
Assignors
HIMORI, SHINJI
Executed: 2004-05-25
ENDOH, SHOSUKE
Executed: 2004-05-25
NAGASEKI, KAZUYA
Executed: 2004-05-25
KUBOTA, TOMOYA
Executed: 2004-05-25
HAYASHI, DAISUKE
Executed: 2004-05-25
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Processing Apparatus and Gas Discharge Suppressing Member