Patent Assignment
Reel/Frame 015411/0143
Assignment of Assignor's Interest
Recorded: 2004-06-02
Pages: 2
Assignors
MULKENS, JOHANNES CATHARINUS HUBERTUS
Executed: 2004-05-06
VAN DEN BRINK, MARINUS AART
Executed: 2004-05-06
LOOPSTRA, ERIK ROELOF
Executed: 2004-05-06
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, NL-5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Lithographic Apparatus, Alignment Apparatus, Device Manufacturing Method, and a Method of Converting an Apparatus