Assignment of Assignor's Interest

Recorded: 2004-06-07 Pages: 2

Assignor

SUPERCRITICAL SYSTEMS, INC.

Executed: 2004-06-01

Assignee

TOKYO ELECTRON LIMITED

AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-848, JAPAN

Covered Property (1)

High-Pressure Processing Chamber for a Semiconductor Wafer

Patent: 7,077,917 →

Application: 10/364,284 →

Publication: US 2004/0157463

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.