Patent Assignment
Reel/Frame 015433/0740
Assignment of Assignor's Interest
Recorded: 2004-06-02
Pages: 3
Assignors
MARXSEN, GERD
Executed: 2003-11-13
KRAMER, JENS
Executed: 2003-11-13
STOECKGEN, UWE GUNTER
Executed: 2003-11-13
Assignee
ADVANCED MICRO DEVICES, INC.
5204 E. BEN WHITE BLVD., AUSTIN, TEXAS, 78741
Covered Property
(1)
Method and System for Controlling the Chemical Mechanical Polishing by Using a Sensor Signal of a Pad Conditioner