Patent Assignment
Reel/Frame 015436/0848
Assignment of Assignor's Interest
Recorded: 2004-06-02
Pages: 2
Assignor
FUMINORI ASA
Executed: 2004-05-13
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
1-1, TENJINKITA-MACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIKYO-KU, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Detecting Apparatus and Method, Substrate Transporting Apparatus and Method, and Substrate Processing Apparatus and Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.