Patent Assignment
Reel/Frame 015440/0651
Assignment of Assignor's Interest
Recorded: 2004-06-04
Pages: 2
Assignee
SUMITOMO EATON NOVA CORPORATION
SBS TOWER 9TH FLOOR, 10-1 YOGA 4-CHOME, SETAGAYA-KU, TOKYO, JAPAN
Covered Property
(1)
Ion Source Apparatus and Cleaning Optimized Method Thereof
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Change of Name
Jul 9, 2007
From: SUMITOMO EATON NOVA, CORPORATION
To: SEN CORPORATION
Reel/Frame 019531/0710 →
Correct Previous Assignment Recorded at 019531/0138, 019531/0013, 019531/0391 and 019531/0710.
Aug 31, 2007
From: SUMITOMO EATON NOVA CORPORATION
To: SEN CORPORATION, AN SHI AND EXCELIS COMPANY
Reel/Frame 019872/0735 →
Re-Record to Correct a Document Previously at Reel 019872, Frame 0735. (Change of Name)
Dec 19, 2007
From: SUMITOMO EATON NOVA, CORPORATION
To: SEN CORPORATION, AN SHI AND AXCELIS COMPANY
Reel/Frame 020279/0987 →