Patent Assignment
Reel/Frame 015445/0968
Assignment of Assignor's Interest
Recorded: 2004-06-03
Pages: 3
Assignors
YUN, SEOKMIN
Executed: 2004-05-21
ZHU, JI
Executed: 2004-05-24
CIRIGLIANO, PETER
Executed: 2004-05-24
LEE, SANGHEON
Executed: 2004-05-24
CHOI, THOMAS S.
Executed: 2004-05-24
LOEWENHARDT, PETER
Executed: 2004-06-01
WILCOXSON, MARK H.
Executed: 2004-05-24
SADJADI, REZA
Executed: 2004-05-25
HUDSON, ERIC A.
Executed: 2004-05-25
TIETZ, JAMES V.
Executed: 2004-06-01
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method for Plasma Stripping Using Periodic Modulation of Gas Chemistry and Hydrocarbon Addition