Patent Assignment
Reel/Frame 015451/0024
Assignment of Assignor's Interest
Recorded: 2004-06-14
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
System and Method of Broad Band Optical End Point Detection for Film Change Indication
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.