Patent Assignment
Reel/Frame 015481/0781
Assignment of Assignor's Interest
Recorded: 2004-06-21
Pages: 2
Assignee
THERMA-WAVE, INC.
1250 RELIANCE WAY, FREMONT, CALIFORNIA, 94539
Covered Property
(1)
Overlay Metrology Method and Apparatus Using More Than One Grating Per Measurement Direction
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.