Patent Assignment
Reel/Frame 015486/0961
Assignment of Assignor's Interest
Recorded: 2004-06-22
Received: 2004-06-24
Pages: 8
Assignors
RYSSEL, HEINER
Executed: 2002-01-21
WALLER, REINHOLD
Executed: 2002-01-22
PFITZNER, LOTHAR
Executed: 2002-01-28
SCHNEIDER, CLAUS
Executed: 2002-01-28
TEGEDER, VOLKER
Executed: 2002-01-29
ZIEGLER, JURGEN
Executed: 2002-02-13
Assignees
FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
LEONRODSTRASSE 54, MUNCHEN, DEX, 80636, GERMANY
INFINEON TECHNOLOGIES SC300 GMBH & CO. KG
MANFRED-VON-ARDENNE-RING 20-D, DRESDEN, DEX, 01099, GERMANY
Covered Property
(1)
Apparatus for Monitoring Intentional or Unavoidable Layer Depositions and Method
Application:
10/033,950 →