Granted Patent
Utility
US 6,784,445
· Confirmation No. 8578
APPARATUS FOR MONITORING INTENTIONAL OR UNAVOIDABLE LAYER DEPOSITIONS AND METHOD
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2005-01-26 | COCOUT |
Certificate of Correction - Post Issue Communication | 1 | View | |
| 2004-10-18 | COCIN |
Request for Certificate of Correction | 3 | View | |
| 2004-09-13 | COCIN |
Request for Certificate of Correction | 2 | View | |
| 2004-06-22 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-06-04 | XRUSH |
Internal Response to Printer Query from Technology Center(TC) | 1 | View | |
| 2004-06-03 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2004-06-03 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-06-03 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-05-13 | RUSH |
Printer Query form, used by the publications branch | 2 | View | |
| 2004-03-17 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2004-03-17 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-03-17 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-03-17 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-03-17 | ANE.I |
Amendment After Final or under 37CFR 1.312, initialed by the examiner. | 1 | View | |
| 2004-03-09 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-03-09 | FWCLM |
Index of Claims | 1 | View | |
| 2004-03-01 | A.NE |
Response After Final Action | 1 | View | |
| 2004-03-01 | CLM |
Claims | 15 | View | |
| 2004-03-01 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2003-12-18 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2003-12-08 | CTFR |
Final Rejection | 6 | View | |
| 2003-12-08 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2003-11-12 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2003-11-12 | FOR |
Foreign Reference | 4 | View | |
| 2003-11-12 | FOR |
Foreign Reference | 4 | View | |
| 2003-11-12 | FOR |
Foreign Reference | 7 | View | |
| 2003-10-23 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2003-10-23 | SPEC |
Specification | 2 | View | |
| 2003-10-23 | CLM |
Claims | 5 | View | |
| 2003-10-23 | REM |
Applicant Arguments/Remarks Made in an Amendment | 7 | View | |
| 2003-10-23 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2003-08-18 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2003-08-18 | FOR |
Foreign Reference | 2 | View | |
| 2003-07-21 | CTNF |
Non-Final Rejection | 7 | View | |
| 2003-07-21 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-07-21 | 1449 |
List of References cited by applicant and considered by examiner | 3 | View | |
| 2003-07-02 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2002-03-21 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 2 | View | |
| 2002-03-21 | OATH |
Oath or Declaration filed | 6 | View | |
| 2002-02-27 | PA.. |
Power of Attorney | 2 | View | |
| 2002-02-27 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2002-02-27 | FOR |
Foreign Reference | 1 | View | |
| 2002-02-27 | FOR |
Foreign Reference | 1 | View | |
| 2002-02-27 | FOR |
Foreign Reference | 1 | View | |
| 2002-02-27 | FOR |
Foreign Reference | 1 | View | |
| 2002-02-27 | FOR |
Foreign Reference | 1 | View | |
| 2002-02-27 | FOR |
Foreign Reference | 1 | View | |
| 2002-02-27 | FRPR |
Certified Copy of Foreign Priority Application | 16 | View | |
| 2002-02-27 | FOR |
Foreign Reference | 24 | View | |
| 2002-02-27 | FOR |
Foreign Reference | 16 | View | |
| 2002-02-27 | FOR |
Foreign Reference | 26 | View | |
| 2002-02-27 | FOR |
Foreign Reference | 34 | View | |
| 2002-02-27 | FOR |
Foreign Reference | 22 | View | |
| 2002-02-27 | FOR |
Foreign Reference | 8 | View | |
| 2002-01-28 | PEFN |
Pre-Exam Formalities Notice | 1 | View | |
| 2001-12-28 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-12-28 | SPEC |
Specification | 17 | View | |
| 2001-12-28 | CLM |
Claims | 5 | View | |
| 2001-12-28 | ABST |
Abstract | 1 | View | |
| 2001-12-28 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2001-12-28 | OATH |
Oath or Declaration filed | 4 | View | |
| 2001-12-28 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2001-12-28 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2001-12-28 | FWCLM |
Index of Claims | 1 | View | |
| 2001-12-28 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-12-28 | SPEC |
Specification | 17 | View | |
| 2001-12-28 | CLM |
Claims | 5 | View | |
| 2001-12-28 | ABST |
Abstract | 1 | View | |
| 2001-12-28 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2001-12-28 | OATH |
Oath or Declaration filed | 4 | View | |
| 2001-12-28 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2001-12-28 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2001-12-28 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View |
Inventors
Jurgen Ziegler
Boll, GERMANY
Reinhold Waller
Igensdorf, GERMANY
Lothar Pfitzner
Erlangen, GERMANY
Claus Schneider
Bubenreuth, GERMANY
Heiner Ryssel
Erlangen, GERMANY
Volker Tegeder
Weissig, GERMANY
Attorneys & Agents of Record
Classification
USPC
250/559.27
H10P74/00
B24B37/013
H10P74/238
C23C14/547
C23C16/4407
C23C16/52
G01B11/0616
H01J37/32935
Prosecution
- Examiner
- LUU, THANH X
- Art Unit
- 2878
- Customer No.
- 24131
- Docket No.
- 1999P8173
- Confirmation No.
- 8578
Foreign Priority
199 29 615.4
·
1999-06-28
·
GERMANY
Publication
- Pub. No.
- US20020089677A1
- Pub. Date
- 2002-07-11
Patent Term Adjustment
-27days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-01-14
FRAUNHOFER-GESELLSHCAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.,
INFINEON TECHNOLOGIES SC300 GMBH & CO. KG
from
RYSSEL, HEINER,
WALLER, REINHOLD,
PFITZNER, LOTHAR,
SCHNEIDER, CLAUS,
TEGEDER, VOLKER,
ZIEGLER, JURGEN
A CORRECTIVE ASSIGNMENT TO CORRECT THE SECOND ASSIGNEE, PREVIOUSLY RECORDED ON REEL 015486 FRAME 0961.
Recorded 2005-07-20
FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.,
INFINEON TECHNOLOGIES SC300 GMBH & CO. KG
from
RYSSEL, HEINER,
WALLER, REINHOLD,
PFITZNER, LOTHAR,
SCHNEIDER, CLAUS,
TEGEDER, VOLKER,
ZIEGLER, JURGEN
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-06-22
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- Patent No.
- US 6,784,445
- App. No.
- 10/033,950
- Filed
- 2001-12-28
- Granted
- 2004-08-31
- Pub. No.
- US20020089677A1
- Examiner
- LUU, THANH X
- Art Unit
- 2878
- PTA
- -27 days
External Links