Patent Assignment
Reel/Frame 016580/0204
A Corrective Assignment to Correct the Second Assignee, Previously Recorded on Reel 015486 Frame 0961.
Recorded: 2005-07-20
Received: 2005-09-26
Pages: 10
Assignors
RYSSEL, HEINER
Executed: 2002-01-21
WALLER, REINHOLD
Executed: 2002-01-22
PFITZNER, LOTHAR
Executed: 2002-01-28
SCHNEIDER, CLAUS
Executed: 2002-01-28
TEGEDER, VOLKER
Executed: 2002-01-29
ZIEGLER, JURGEN
Executed: 2002-02-13
Assignees
FRAUNHOFER-GESELLSHCAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
LEONRODSTRASSE 54, MUNCHEN, DEX, 80636, GERMANY
INFINEON TECHNOLOGIES SC300 GMBH & CO. KG
KONIGSBRUCKERSTR. 180, DRESDEN, DEX, 01099, GERMANY
Covered Property
(1)
Apparatus for Monitoring Intentional or Unavoidable Layer Depositions and Method
Application:
10/033,950 →