Security Agreement

Recorded: 2004-12-27 Received: 2004-12-27 Pages: 11

Assignor

CELERITY, INC.

Executed: 2004-12-23

Assignee

TENNENBAUM CAPITAL PARTNERS, LLC

2951 28TH STREET, SANTA MONICA, CA, 90405, UNITED STATES

Covered Properties (14)

Surface mount heater

Application: 60/518,357 →

Method and Apparatus for Blending Process Materials

Application: 10/343,360 →

Modular Substrate Gas Panel Having Manifold Connections in a Common Plane

Application: 10/650,102 →

Methods and Apparatus for Pressure Compensation in a Mass Flow Controller

Application: 10/622,080 →

Variable Resistance Sensor with Common Reference Leg

Application: 10/622,004 →

Flow Sensor Signal Conversion

Application: 10/400,149 →

Method and Apparatus for Providing a Determined Ratio of Process Fluids

Application: 10/154,433 →

Fluid Flow System

Application: 10/147,427 →

System and Method for a Mass Flow Controller

Application: 10/131,603 →

Semiconductor Process Tool Incorporating Heat Exchanger

Application: 10/094,500 →

Gas Panel

Application: 09/939,487 →

Method and Apparatus for Blending Process Materials

Application: 09/919,772 →

Method and apparatus for providing a determined ratio of process fluids

Application: 60/293,356 →

Method and Apparatus for Balancing Resistance

Application: 09/783,439 →