IP Library › Patent Application 10094500
Patent Application Utility
App. No. 10/094,500 · Confirmation No. 3524

SEMICONDUCTOR PROCESS TOOL INCORPORATING HEAT EXCHANGER

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2003-10-09 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-10-09 A.NA Amendment after Notice of Allowance (Rule 312) 1 View
2003-10-09 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-10-09 DRW Drawings-only black and white line drawings 3 View
2003-10-09 OATH Oath or Declaration filed 3 View
2003-10-09 LET. Miscellaneous Incoming Letter 2 View
2002-03-08 TRNA Transmittal of New Application 2 View
2002-03-08 SPEC Specification 15 View
2002-03-08 CLM Claims 6 View
2002-03-08 ABST Abstract 1 View
2002-03-08 DRW Drawings-only black and white line drawings 3 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
10/094,500
Filed
2002-03-08
Granted
2004-03-16
Pub. No.
US20030167781A1
Art Unit
3763
PTA
-236 days