Patent Assignment
Reel/Frame 015488/0848
Assignment of Assignor's Interest
Recorded: 2004-06-16
Pages: 3
Assignors
SHIGETOMI, KENICHI
Executed: 2004-06-08
SATA, NOBUYUKI
Executed: 2004-06-08
TAKEI, TOSHICHIKA
Executed: 2004-06-08
KANEDA, MASATOSHI
Executed: 2004-06-08
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method