Patent Assignment
Reel/Frame 015492/0199
Assignment of Assignor's Interest
Recorded: 2004-06-18
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Probing Method and Probing Apparatus