Patent Assignment
Reel/Frame 015496/0491
Assignment of Assignor's Interest
Recorded: 2004-06-24
Pages: 3
Assignors
SAITO, TAKAYUKI
Executed: 2003-12-15
SUZUKI, TSUKURU
Executed: 2003-12-15
YAMADA, KAORU
Executed: 2003-12-15
ITO, KENYA
Executed: 2003-12-15
KAMEZAWA, MASAYUKI
Executed: 2003-12-15
YAMAGUCHI, KENJI
Executed: 2003-12-15
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method