Patent Assignment
Reel/Frame 015508/0490
Assignment of Assignor's Interest
Recorded: 2004-06-24
Pages: 5
Assignors
BAKKER, LEVINUS PIETER
Executed: 2004-04-09
KURT, RALPH
Executed: 2004-06-04
MERTENS, BASTIAAN MATTHIAS
Executed: 2004-05-18
WEISS, MARKUS
Executed: 2004-05-19
TRENKLER, JOHANN
Executed: 2004-05-07
SINGER, WOLFGANG
Executed: 2004-05-13
Assignees
ASML NETHERLANDS B.V.
DE RUN 6501, NL-5504 VELDHOVEN, NETHERLANDS
CARL ZEISS SMT AG
CARL ZEISS-STRASSE 22, D-73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Method for Cleaning a Surface of a Component of a Lithographic Projection Apparatus, Lithographic Projection Apparatus, Device Manufacturing Method and Cleaning System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.