Patent Assignment
Reel/Frame 015511/0716
Assignment of Assignor's Interest
Recorded: 2004-06-23
Pages: 2
Assignors
MAEKAWA, SHINJI
Executed: 2004-06-15
KAKEHATA, TETSUYA
Executed: 2004-06-15
TAKEHARA, YUUICHI
Executed: 2004-06-15
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398 HASE ATSUGI-SHI, INTELLECTUAL PROPERTY DIVISION, KANAGAWA-KEN 243-0036, JAPAN
Covered Property
(1)
Silicon Nitride Film, a Semiconductor Device, a Display Device and a Method for Manufacturing a Silicon Nitride Film