Patent Assignment
Reel/Frame 015520/0389
Assignment of Assignor's Interest
Recorded: 2005-01-05
Pages: 3
Assignors
GALLAGHER, EMILY F.
Executed: 2004-12-06
KINDT, LOUIS M.
Executed: 2004-12-06
SLINKMAN, JAMES A.
Executed: 2004-12-03
WISTROM, RICHARD E.
Executed: 2004-12-07
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Method for Adjusting Lithographic Mask Flatness Using Thermally Induced Pellicle Stress
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.