Patent Assignment
Reel/Frame 015547/0026
Assignment of Assignor's Interest
Recorded: 2005-01-05
Pages: 4
Assignors
TAKESHITA, KENJI
Executed: 2004-11-16
ASO, TSUYOSHI
Executed: 2004-11-16
KAWAGUCHI, SEIJI
Executed: 2004-11-16
MCCLARD, THOMAS
Executed: 2004-11-17
CHEN, WAN-LIN
Executed: 2004-11-17
MAGNI, ENRICRO
Executed: 2004-11-17
KELLY, MICHAEL
Executed: 2004-11-16
LUPAN, MICHELLE
Executed: 2004-11-16
HEFTY, ROBERT
Executed: 2004-11-16
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods for Protecting Silicon or Silicon Carbide Electrode Surfaces from Morphological Modification During Plasma Etch Processing