Patent Assignment
Reel/Frame 015556/0951
Assignment of Assignor's Interest
Recorded: 2004-07-12
Pages: 2
Assignor
OHTSUKA, MASARU
Executed: 2004-06-02
Assignee
CANON KABUSHIKI KAISHA
3-30-2, SHIMOMARUKO, 3-CHOME, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Optical System in Exposure Apparatus, and Device Manufacturing Method