Patent Assignment
Reel/Frame 015574/0387
Assignment of Assignor's Interest
Recorded: 2004-07-14
Pages: 2
Assignor
JOE, RAYMOND
Executed: 2004-07-14
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107, JAPAN
Covered Property
(1)
Low-Temperature Plasma-Enhanced Chemical Vapor Deposition of Silicon-Nitrogen-Containing Films