Patent Assignment
Reel/Frame 015580/0407
Assignment of Assignor's Interest
Recorded: 2004-07-22
Pages: 13
Assignors
MIEHER, WALTER D.
Executed: 2004-06-11
LEVY, ADY
Executed: 2004-06-14
GOLOVANEVSKY, BORIS
Executed: 2004-07-12
FRIEDMANN, MICHAEL
Executed: 2004-06-11
SMITH, IAN
Executed: 2004-06-14
ADEL, MICHAEL E.
Executed: 2004-07-11
GHINOVKER, MARK
Executed: 2004-07-12
FIELDEN, JOHN
Executed: 2004-06-10
BAREKET, NOAH
Executed: 2004-06-14
Assignee
KLA-TENCOR TECHNOLOGIES CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Apparatus and Methods for Detecting Overlay Errors Using Scatterometry