Patent Assignment
Reel/Frame 015581/0203
Assignment of Assignor's Interest
Recorded: 2005-01-19
Pages: 3
Assignors
CHENG, YI-FANG
Executed: 2004-10-14
YU, SHAN-JEN
Executed: 2004-12-01
CHEN, CHENG-KWENG
Executed: 2004-12-28
HUANG, YU-MING
Executed: 2004-10-14
Assignee
UNITED MICROELECTRONICS CORP.
NO. 3, LI-HSIN RD. II, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, TAIWAN
Covered Property
(1)
Method for Removing Polymer as Etching Residue