Assignment of Assignor's Interest

Recorded: 2004-07-19 Pages: 4

Assignors

SINGER, WOLFGANG

Executed: 2004-03-23

ANTONI, MARTIN

Executed: 2004-05-12

DIECKMANN, NILS

Executed: 2004-04-05

ROTHWEILER, DIRK

Executed: 2004-05-21

SCHULTZ, JORG

Executed: 2004-03-23

Assignee

CARL ZEISS SMT AG

CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Euv Illumination System Having a Plurality of Light Sources for Illuminating an Optical Element

Patent: 7,329,886 →

Application: 10/755,846 →

Publication: US 2004/0256575

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.