Patent Assignment
Reel/Frame 015591/0226
Assignment of Assignor's Interest
Recorded: 2004-07-19
Pages: 6
Assignors
WU, QUNWEI
Executed: 2004-06-23
KEIGLER, ARTHUR
Executed: 2004-06-23
LIU, ZHENQIU
Executed: 2004-06-28
HARRELL, JOHN
Executed: 2004-06-23
BOWLER, STEVE
Executed: 2004-06-24
Assignee
NEXX SYSTEMS PACKAGING, LLC
5 SUBURBAN PARK DRIVE, BILLERICA, MASSACHUSETTS, 01821-3904
Covered Property
(1)
Method and apparatus for fluid processing and drying a substrate
Application:
60/581,050 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.