Method and apparatus for fluid processing and drying a substrate

Inventors: Qunwei Wu, Arthur Keigler, Zhenqui Liu, John Harrell, Steve Bowler

Provisional Application Expired

	Code	Description	Pages	PDF
2004-06-18	`TRNA`	Transmittal of New Application	1	View
2004-06-18	`SPEC`	Specification	11	View
2004-06-18	`CLM`	Claims	1	View
2004-06-18	`DRW`	Drawings-only black and white line drawings	6	View
2004-06-18	`ADS`	Application Data Sheet	3	View
2004-06-18	`WFEE`	Fee Worksheet (SB06)	1	View

Inventors

Qunwei Wu Westford, MA

Arthur Keigler Wellesley, MA

Zhenqui Liu Northboro, MA

John Harrell Paxton, MA

Steve Bowler Tyngsboro, MA

Attorneys & Agents of Record

GAJADHAR BHAKTA Reg. 79342 Agent · PROSKAUER ROSE LLP

KATRYNA WILLIAMS Reg. 82471 Agent

COLIN CABRAL Reg. 73952 Attorney · PROSKAUER ROSE LLP

BALDASSARE VINTI Reg. 43970 Attorney · PROSKAUER

NOLAN GOLDBERG Reg. 54126 Attorney · PROSKAUER ROSE LLP

ALAN TERAN Reg. 75452 Agent · WHITE & CASE LLP

ERIK MILCH Reg. 42887 Attorney · PROSKAUER ROSE LLP

JAMES ANDERSON Reg. 70892 Attorney · PROSKAUER ROSE LLP

NICHOLAS PRAIRIE Reg. 70499 Agent

SANG A KIM Reg. 78330 Agent · PROSKAUER ROSE LLP

FANGLI CHEN Reg. 51551 Attorney · PROSKAUER ROSE LLP

LINGYUN JIA Reg. 70298 Agent

AMIR NAINI Reg. 45770 Attorney · PROSKAUER ROSE LLP

Prosecution

ENTERPRISE PARTNERS VI, L.P., AS COLLATERAL AGENT

from NEXX SYSTEMS, INC.

SECURITY AGREEMENT Recorded 2004-11-04

NEXX SYSTEMS PACKAGING, LLC

from HARRELL, JOHN, KEIGLER, ARTHUR, WU, QUNWEI, BOWLER, STEVE, LIU, ZHENQIU

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded 2004-07-19

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