Patent Assignment
Reel/Frame 015600/0737
Assignment of Assignor's Interest
Recorded: 2004-07-23
Pages: 3
Assignors
OKUBO, KAZUYA
Executed: 2004-06-17
TACHIBANA, MITSUHIRO
Executed: 2004-06-17
FANG, CHENG
Executed: 2004-06-17
SUZUKI, KENJI
Executed: 2004-06-17
SATO, KOHICHI
Executed: 2004-06-17
ISHIZUKA, HOTAKA
Executed: 2004-06-17
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Method of Forming Tungsten Film