Patent Assignment
Reel/Frame 015614/0177
Assignment of Assignor's Interest
Recorded: 2004-07-23
Pages: 2
Assignor
SOGARD, MICHAEL
Executed: 2004-07-20
Assignee
NIKON CORPORATION
2-3 MARUNOUCHI, 3-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Extreme Ultraviolet Reticle Protection Using Gas Flow Thermophoresis