Patent Assignment
Reel/Frame 015628/0824
Assignment of Assignor's Interest
Recorded: 2005-02-01
Pages: 8
Assignors
SUZUKI, KENJI
Executed: 2004-11-29
GUIDOTTI, EMMANUEL P.
Executed: 2004-12-01
LEUSINK, GERRIT J.
Executed: 2004-12-01
HARA, MASAMICHI
Executed: 2004-12-03
KUROIWA, DAISUKE
Executed: 2004-12-03
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, MINATO-KU, TBS BROADCAST CENTER, TOKYO, 107, JAPAN
Covered Property
(1)
Multi-Tray Film Precursor Evaporation System and Thin Film Deposition System Incorporating Same