IP Library › Assignment 015660/0687
Patent Assignment
Reel/Frame 015660/0687

Assignment of Assignor's Interest

Recorded: 2004-08-09 Pages: 5
Assignors
SEZGINER, ABDURRAHMAN
Executed: 2004-06-21
HUANG, HSU-TING
Executed: 2004-06-21
JOHNSON, KENNETH
Executed: 2004-06-17
Assignee
THERMA-WAVE, INC.
1250 RELIANCE WAY, FREMONT, CALIFORNIA, 94539
Covered Property (1)
Diffracting, Aperiodic Targets for Overlay Metrology and Method to Detect Gross Overlay
Patent: 7,230,704 →
Application: 10/858,691 →
Publication: US 2004/0246482
Related Assignments (2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Oct 7, 2005
From: THERMA-WAVE, INC.
To: TOKYO ELECTRON LIMITED
Reel/Frame 016851/0953 →
Assignment of Assignor's Interest Oct 24, 2005
From: THERMA-WAVE, INC.
To: TOKYO ELECTRON LIMITED
Reel/Frame 017136/0621 →