Patent Assignment
Reel/Frame 015663/0387
Assignment of Assignor's Interest
Recorded: 2004-08-09
Pages: 3
Assignors
ICHIKI, KATSUNORI
Executed: 2004-02-10
YAMAUCHI, KAZUO
Executed: 2004-02-10
HIYAMA, HIROKUNI
Executed: 2004-02-10
SAMUKAWA, SEIJI
Executed: 2004-02-10
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Etching Method and Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.