Patent Assignment
Reel/Frame 015665/0313
Assignment of Assignor's Interest
Recorded: 2004-08-06
Pages: 3
Assignors
KOSHIISHI, AKIRA
Executed: 2004-06-03
HASHIMOTO, MITSURU
Executed: 2004-06-03
TANAKA, HIDEAKI
Executed: 2004-06-03
TAHARA, SHIGERU
Executed: 2004-06-03
HINATA, KUNIHIKO
Executed: 2004-06-03
OOYABU, JUN
Executed: 2004-06-03
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Ring Mechanism, and Plasma Processing Device Using the Ring Mechanism