Patent Assignment
Reel/Frame 015685/0077
Assignment of Assignor's Interest
Recorded: 2004-08-16
Pages: 3
Assignors
KIRCHNER, ANDREAS
Executed: 2004-04-02
KNEER, BERNHARD
Executed: 2004-05-04
MANN, HANS-JURGEN
Executed: 2004-05-07
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STR. 22, D-73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Method for Distortion Correction in a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.