Patent Assignment
Reel/Frame 015692/0684
Assignment of Assignor's Interest
Recorded: 2004-08-05
Pages: 3
Assignor
TANAKA, KOICHIRO
Executed: 2004-07-29
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO. LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Laser Irradiation Method, Method for Manufacturing a Semiconductor Device, and a Semiconductor Device