Patent Assignment
Reel/Frame 015695/0295
Assignment of Assignor's Interest
Recorded: 2005-02-17
Pages: 4
Assignors
DHINDSA, RAJINDER
Executed: 2005-01-14
S.M. REZA, SADJADI
Executed: 2005-01-24
KOZAKEVICH, FELIX
Executed: 2005-01-27
TRUSSEL, DAVE
Executed: 2005-02-14
LI, LUMIN
Executed: 2005-01-20
LENZ, ERIC
Executed: 2005-01-20
RUSU, CAMELIA
Executed: 2005-01-20
SRINIVASAN, MUKUND
Executed: 2005-01-24
EPPLER, AARON
Executed: 2005-01-25
TIETZ, JIM
Executed: 2005-01-20
MARKS, JEFFREY
Executed: 2005-02-02
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREEMONT, CALIFORNIA, 94538
Covered Property
(1)
Multiple Frequency Plasma Etch Reactor Processor Method and Apparatus