Patent Assignment
Reel/Frame 015696/0585
Assignment of Assignor's Interest
Recorded: 2004-03-31
Pages: 3
Assignor
KIIHAMAKI, JYRKI
Executed: 2004-03-16
Assignee
VALTION TEKNILLINEN TUTKIMUSKESKUS
VUORIMIEHENTIE 5, VTT, FIN-02044, FINLAND
Covered Property
(1)
Method for Forming a Cavity Structure on Soi Substrate and Cavity Structure Formed on Soi Substrate