Patent Assignment
Reel/Frame 015712/0833
Assignment of Assignor's Interest
Recorded: 2004-08-19
Pages: 3
Assignors
SEKIGUCHI, SHINICHI
Executed: 2004-07-01
OGAMINO, HIROAKI
Executed: 2004-07-01
KAWASHIMA, HIROYASU
Executed: 2004-07-01
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Turbo Vacuum Pump and Semiconductor Manufacturing Apparatus Having the Same