Assignment of Assignor's Interest

Recorded: 2005-02-15 Pages: 3

Assignors

FIOLKA, DAMIAN

Executed: 2005-01-25

SCHOLZ, AXEL

Executed: 2005-01-27

MAUL, MANFRED

Executed: 2005-01-24

Assignee

CARL ZEISS SMT AG

CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Illumination System and Polarizer for a Microlithographic Projection Exposure Apparatus

Patent: 7,408,622 →

Application: 10/994,141 →

Publication: US 2005/0140958

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.